28-G & 28-1, Jalan Suria Puchong 4,
Pusat Perniagaan Suria Puchong,
47110 Puchong,
Selangor, Malaysia.
+6012-234 0081
Item Code | 00 |
---|---|
Model | PiPi |
Model | PiPi |
Plasma mode | RIE (reactive ion etching) |
Electrode structure | Parallel flat panel type |
Electrode dimensions | W130×D130mm |
Internal dmensions | W230×D130×H100mm |
External dimensions | W438×D520×H565mm |
Power source (50/60Hz) | AC115V/AC220V Single phase with step-down transformer |
Vacuum meter | Bourdon gauge |
Controller | Sequencer |
Operation/display unit | 4.5-inch monochrome STN touch panel |
High-frequency out-put power | 50-200W |
Reference oscillator | Quarts oscillator |
Oscillation frequency | 13.56MHz |
Output setting | Manual setting knob |
Matching method | Auto tuning |
Purge gas | N2 1/4-inch bite type tube fitting |
Reaction gas | Ar mass flow meter 1/4-inch bite type tube fitting |
Internal dimensions£¨W×D×H mm£© | 230×130×100mm |
External dimensions£¨W×D×H mm£© | 438×520×565mm |
Power Source |
115V /220V Single phase with step-down transformer |
Weight | 50kg |