Renetech Sdn Bhd
28-G & 28-1, Jalan Suria Puchong 4,
Pusat Perniagaan Suria Puchong,
47110 Puchong,
Selangor, Malaysia.
+6012-234 0081

Plasma Reactor (Barrel Chamber) (PR510)

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Plasma Reactor (Barrel Chamber) (PR510) PR Series Plasma Modifier Plasma Equipment


Compact, Barrel Type, Low Temperature Ashing Device
 
Features of Plasma Reactor (Barrel Chamber) (PR510)
  • Designed with large chamber size made of quartz considered almost completely resistant against most plasma processes
  • RF Power: Max. 500W
  • Space-saving design with oscillation section integrated with a portion of the chamber
  • Equipped with a large quartz chamber (φ215mm) which can process bigger testing samples
  • Outstanding operability and safety by the automatic tuning system equipped as a standard function
Specifications
Item Code 215012
Model PR510
System DP mode, Barrel type
High Frequency Output Max. 500W
Oscillation Frequency 13.56MHz
Tuning Method Automatic tuning
Reaction Chamber Quartz φ215 × L305 mm x 1 chamber
Reaction Gas System Dual system (oxygen/CF4)
Control System Automatic touch panel
Piping Material SUS, Teflon
External Dimensions W520 × D630 × H760mm
Accessories Connection cable: 1 set, Vacuum grease: 1 pc., O-ring for reaction chamber: 1 pc.
Internal dimensions£¨φ×D mm£© φ215×305mm
External dimensions£¨W×D×H mm£© 520×630×760mm
Remarks(dimensions) 215φ x 305Dmm x 1 chamber
Power Source AC200VV 8 (15A)A
Three phase
Weight 60kg
 
Maintenance and warranty
Conditions: temperature and humidity: 23 deg.C+/-5 deg.C, 65%RH+/-20% (no load)
External dimensions do not include protrusions.

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