Renetech Sdn Bhd
28-G & 28-1, Jalan Suria Puchong 4,
Pusat Perniagaan Suria Puchong,
47110 Puchong,
Selangor, Malaysia.
+6012-234 0081

Plasma Cleaner (Parallel Electrode) (V1000)

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Plasma Cleaner (Parallel Electrode) (V1000) V1000 Series Gas Plasma Cleaners Plasma Equipment Plasma Cleaner (Parallel Electrode) (V1000) V1000 Series Gas Plasma Cleaners Plasma Equipment


Suitable for dry cleaning process such as the removal of organic substances, oxidized film, and for surface cleaning, etching, etc.
 
Features of Plasma Cleaner (Parallel Electrode) (V1000)
  • Plasma Surface Cleaning Device
  • The electrodes can be replaced by specially developed electrodes to improve the plasma efficiency
  • High-precision matching unit and highly reliable RF generator
Specifications
Item Code 328212
Model V1000
Plasma Mode DP/RIE
Oscillation Frequency 13.56MHz
RF Power 1,000W
Stage Dimensions 280W × 280D mm¡¡Parallel flat stage
Reaction Gas Mass flow control, 2 system + 1 for purge gas
Vacuum Pump Included, Approx. 1,000L/min exhaust volume
Safety Device Door switch, Interlock of side panel, Emergency stop switch, Overheat prevention device
Internal dimensions£¨W×D×H mm£© 400×400×380mm
External dimensions£¨W×D×H mm£© 700×800×1600mm
Remarks(dimensions) Stage dimensions: 280W x 280D mm
Power Source 3P 200V to 415V
A step-down transformer is required to meet the local voltage (from the local voltage to 3-phase AC200)
Weight 1000kg
 
Maintenance and warranty
Conditions: temperature and humidity: 23 deg.C+/-5 deg.C, 65%RH+/-20% (no load)
External dimensions do not include protrusions.

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