28-G & 28-1, Jalan Suria Puchong 4,
Pusat Perniagaan Suria Puchong,
47110 Puchong,
Selangor, Malaysia.
+6012-234 0081
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Item Code | 328212 |
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Model | PDC510 |
Plasma Mode | RIE and DP mode changeable |
Electrode Structure | Parallel flat stage |
RF Power | MAX. 500W |
Oscillation Frequency | 13.56MHz¡¡Quartz Oscillator |
Display | LED touch panel |
Chamber Dimensions | W500 × D300 × H200mm |
Stage Size | W410 × D210mm |
Chamber Material | Aluminium |
Reaction Gas | 2 systems£¨Ar, O2£© |
Purge Gas | N2 or Dry air |
Reaction Gas Flow Control | Mass flow controller |
Vacuum Pump | Not included |
Gas Inlet Port | Reaction Gas: 2 points, Purge Gas: 1 point |
External Dimensions / Weight | W700 × D700 × H700mm / Approx. 180kg |
Internal dimensions£¨W×D×H mm£© | 500×300×200mm |
External dimensions£¨W×D×H mm£© | 700×700×700mm |
Remarks(dimensions) | 00 |
Power Source |
AC200~415V Three phase with step-down transformer |
Weight | 180kg |