Renetech Sdn Bhd
28-G & 28-1, Jalan Suria Puchong 4,
Pusat Perniagaan Suria Puchong,
47110 Puchong,
Selangor, Malaysia.
+6012-234 0081

Plasma Cleaner (Parallel Electrode) (PDC610)

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Plasma Surface Treatment Device
 
Features of Plasma Cleaner (Parallel Electrode) (PDC610)
  • Compact plasma cleaner for R&D or any other wide range of applications
  • Max. RF power 600W
  • RIE / DP mode switchable
  • Electrodes can be set among 1 to 3 stages
  • Integrated data logger can be installed (Optional)
  • Matching point memory function can be installed (Optional)
Specifications
Item Code 00
Model PDC610
Plasma Mode RIE and DP mode changeable by touch panel
Electrode Structure 3-stage independent parallel flat stage
RF Power MAX. 600W
Oscillation Frequency 13.56MHz¡¡Quartz Oscillator
Chamber Dimensions W350 × D270 × H300mm
Stage Size W250 × D220mm x 3 stages
Chamber Material Aluminium
Reaction Gas 2 systems£¨Ar, O2£©
Purge Gas N2 or Dry air
Vacuum Pump Not included
Gas Inlet Port Reaction Gas: 2 points, Purge Gas: 1 point
Output Setting Manual setting on LED touch panel
Internal dimensions£¨W×D×H mm£© 350×270×300mm
External dimensions£¨W×D×H mm£© 600×722×700mm
Remarks(dimensions) 00
Power Source AC200 to 415V
Three phase with step-down transformer
Weight 180kg
 
Maintenance and warranty
Conditions: temperature and humidity: 23 deg.C+/-5 deg.C, 65%RH+/-20% (no load)
External dimensions do not include protrusions.

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