28-G & 28-1, Jalan Suria Puchong 4,
Pusat Perniagaan Suria Puchong,
47110 Puchong,
Selangor, Malaysia.
+6012-234 0081
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Item Code | 00 |
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Model | PDC610 |
Plasma Mode | RIE and DP mode changeable by touch panel |
Electrode Structure | 3-stage independent parallel flat stage |
RF Power | MAX. 600W |
Oscillation Frequency | 13.56MHz¡¡Quartz Oscillator |
Chamber Dimensions | W350 × D270 × H300mm |
Stage Size | W250 × D220mm x 3 stages |
Chamber Material | Aluminium |
Reaction Gas | 2 systems£¨Ar, O2£© |
Purge Gas | N2 or Dry air |
Vacuum Pump | Not included |
Gas Inlet Port | Reaction Gas: 2 points, Purge Gas: 1 point |
Output Setting | Manual setting on LED touch panel |
Internal dimensions£¨W×D×H mm£© | 350×270×300mm |
External dimensions£¨W×D×H mm£© | 600×722×700mm |
Remarks(dimensions) | 00 |
Power Source |
AC200 to 415V Three phase with step-down transformer |
Weight | 180kg |