Renetech Sdn Bhd
28-G & 28-1, Jalan Suria Puchong 4,
Pusat Perniagaan Suria Puchong,
47110 Puchong,
Selangor, Malaysia.
+6012-234 0081

Plasma Cleaner (Parallel Electrode) (PDC210)

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Plasma Cleaner (Parallel Electrode) (PDC210) PDC Series Plasma Dry Cleaner Plasma Equipment Plasma Cleaner (Parallel Electrode) (PDC210) PDC Series Plasma Dry Cleaner Plasma Equipment Plasma Cleaner (Parallel Electrode) (PDC210) PDC Series Plasma Dry Cleaner Plasma Equipment


Small and compact, suitable for R&D or any other dry cleaning processes
 
Features of Plasma Cleaner (Parallel Electrode) (PDC210)
  • Plasma Surface Treatment Device
  • Simple and compact plasma surface treatment device
  • RIE mode (DP mode is optional)
  • Excellent electrode structure for plasma uniformity
  • Touch panel for easy operation
  • Equipped with 0 point stability vacuum manometer
Specifications
Item Code 328211
Model PDC210
Plasma Mode RIE£¨DP mode is optional£©
Electrode Structure Parallel flat stage
RF Power MAX. 500W
Oscillation Frequency 13.56MHz¡¡Quartz Oscillator
Display LED touch panel
Chamber Dimensions W400 × D250 × H150mm
Stage Size W250 × D170mm
Chamber Material Aluminium
Reaction Gas 2 systems£¨Ar, O2£©
Purge Gas N2 or Dry air
Reaction Gas Flow Control Mass flow controller
Vacuum Pump Not included
Gas Inlet Port Reaction Gas: 2 points, Purge Gas: 1 point
External Dimensions / Weight W540 × D600 × H600mm / Approx. 105kg
Internal dimensions£¨W×D×H mm£© 400×250×150mm
External dimensions£¨W×D×H mm£© 540×600×600mm
Remarks(dimensions) 00
Power Source AC200 to AC415V
Three phase with step-down transformer
Weight 105kg
 
Maintenance and warranty
Conditions: temperature and humidity: 23 deg.C+/-5 deg.C, 65%RH+/-20% (no load)
External dimensions do not include protrusions.

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