Renetech Sdn Bhd
28-G & 28-1, Jalan Suria Puchong 4,
Pusat Perniagaan Suria Puchong,
47110 Puchong,
Selangor, Malaysia.
+6012-234 0081

Plasma Cleaner (Parallel Electrode) (V1000XS)

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Plasma Cleaner (Parallel Electrode) (V1000XS) V1000 Series Gas Plasma Cleaners Plasma Equipment Plasma Cleaner (Parallel Electrode) (V1000XS) V1000 Series Gas Plasma Cleaners Plasma Equipment


Big capacity model suitable for dry cleaning process such as the removal of organic substances, oxidized film, and for surface cleaning, etching, etc.
 
Features of Plasma Cleaner (Parallel Electrode) (V1000XS)
  • The electrodes can be replaced by specially developed electrodes to improve the plasma efficiency
  • High-precision matching unit and highly reliable RF generator
Specifications
Item Code 328214
Model V1000XS
Plasma Mode DP/RIE
Oscillation Frequency 13.56MHz
RF Power 1,000 & 1,500W
Stage Dimensions 400W × 375D mm, Parallel flat double stage
Reaction Gas Mass flow control, 2 system + 1 for purge gas
Vacuum Pump Included, Approx. 1,000L/min exhaust volume
Safety Device Door switch, Interlock of side panel, Emergency stop switch, Overheat prevention device
Internal dimensions£¨W×D×H mm£© 600×554×440mm
External dimensions£¨W×D×H mm£© 900×1000×2040mm
Remarks(dimensions) Stage dimensions: 400W x 375D mm
Power Source 3P 200V to 415V
A step-down transformer is required to meet the local voltage (from the local voltage to 3-phase AC200)
Weight 00kg
 
Maintenance and warranty
Conditions: temperature and humidity: 23 deg.C+/-5 deg.C, 65%RH+/-20% (no load)
External dimensions do not include protrusions.

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